| 介质上电润湿液滴驱动的研究 | |
| 吴建刚 ; 岳瑞峰 ; 曾雪锋 ; 刘理天 ; Wu Jiangang ; Yue Ruifeng ; Zeng Xuefeng ; Liu Litian | |
| 2010-07-19 ; 2010-07-19 | |
| 关键词 | 微流体 芯片实验室 微机械 介质上电润湿 microfluidics lab-on-chip MEMS electrowetting-on-dielectric O363 |
| 其他题名 | Research on Electrowetting-on-Dielectrics Actuation |
| 中文摘要 | 制备了介质上电润湿液滴驱动器,该驱动器采用“三明治”结构下极板由Ti/Pt微电极阵列、Si3N4介质薄膜、碳氟聚合物疏水薄膜组成,上极板是覆盖有疏水薄膜的透明电极,液滴被夹在上下电极之间。分析了驱动器的驱动原理、驱动阻尼以及介质层捕获电荷的影响,讨论硅油填充“三明治”结构和空气填充“三明治”结构的差异。; A prototype of an electrowetting-on-dielectrics actuator was presented, consisting of two parallel plates and a sandwiched droplet. The bottom plate consists of Ti/Pt as the microelectrode array, a Si_3N_4 film as the dielectric layer and a fluorocarbon polymer film as the hydrophobic layer. The top plate consists of a fluorocarbon polymer film as the hydrophobic layer and a transparent electrode. The driving principles of the actuation, the flow resistance, the influences of trapped charge and the differences between the oil-filled structure and air-filled structures were discussed.; 国家自然科学基金资助项目(10472055); 清华大学基础研究资金资助项目(JC2003060) |
| 语种 | 中文 ; 中文 |
| 内容类型 | 期刊论文 |
| 源URL | [http://hdl.handle.net/123456789/76335]  |
| 专题 | 清华大学 |
| 推荐引用方式 GB/T 7714 | 吴建刚,岳瑞峰,曾雪锋,等. 介质上电润湿液滴驱动的研究[J],2010, 2010. |
| APA | 吴建刚.,岳瑞峰.,曾雪锋.,刘理天.,Wu Jiangang.,...&Liu Litian.(2010).介质上电润湿液滴驱动的研究.. |
| MLA | 吴建刚,et al."介质上电润湿液滴驱动的研究".(2010). |
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