Comparison of TiO2 and ZrO2 films deposited by electron-beam evaporation and by sol-gel process

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 光学薄膜技术研究与发展中心

	Comparison of TiO2 and ZrO2 films deposited by electron-beam evaporation and by sol-gel process
	Yao Jian-Ke ; Li Hai-Yuan ; Fan Zheng-Xiu ; Tang Yong-Xing ; Jin Yun-Xia ; Zhao Yuan-An ; He HB(贺洪波) ; Shao JD(邵建达)
刊名	chin. phys. lett.
	2007
卷号	24 期号:7 页码:1964
关键词	THIN-FILMS COATINGS LASERS
ISSN号	0256-307x
中文摘要	tio2 and zro2 films are deposited by electron-beam (eb) evaporation and by sol-gel process. the film properties are characterized by visible and fourier-transform infrared spectrometry, x-ray diffraction analysis, surface roughness measure, absorption and laser-induced damage threshold (lidt) test. it is found that the sol-gel elms have lower refractive index, packing density and roughness than eb deposited films due to their amorphous structure and high oh group concentration in the film. the high lidt of sol-gel films is mainly due to their amorphous and porous structure, and low absorption. lidt of eb deposited film is considerably affected by defects in the elm, and lidt of sol-gel deposited film is mainly effected by residual organic impurities and solvent trapped in the film.
学科主题	光学薄膜
收录类别	0
语种	英语
WOS记录号	WOS:000247577900049
公开日期	2009-09-22
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/4510]
专题	上海光学精密机械研究所_光学薄膜技术研究与发展中心
推荐引用方式 GB/T 7714	Yao Jian-Ke,Li Hai-Yuan,Fan Zheng-Xiu,et al. Comparison of TiO2 and ZrO2 films deposited by electron-beam evaporation and by sol-gel process[J]. chin. phys. lett.,2007,24(7):1964, 1966.
APA	Yao Jian-Ke.,Li Hai-Yuan.,Fan Zheng-Xiu.,Tang Yong-Xing.,Jin Yun-Xia.,...&邵建达.(2007).Comparison of TiO2 and ZrO2 films deposited by electron-beam evaporation and by sol-gel process.chin. phys. lett.,24(7),1964.
MLA	Yao Jian-Ke,et al."Comparison of TiO2 and ZrO2 films deposited by electron-beam evaporation and by sol-gel process".chin. phys. lett. 24.7(2007):1964.