| 直线电机精密工作台扰动观测器设计 | |
| 杨开明 ; 叶佩青 ; 游华云 ; 褚毅成 ; Yang Kaiming ; Ye Peiqing ; You Huayun ; Chu Yicheng | |
| 2010-06-08 ; 2010-06-08 | |
| 关键词 | 直线电机 精密工作台 扰动观测器 运动控制 linear motor precision stage disturbance observer motion control TM359.4 |
| 其他题名 | Design of Disturbance Observer Based on Linear Motor Precision Stage |
| 中文摘要 | 针对直线电机驱动、气浮导轨支撑的精密工作台没有机械阻尼、抗扰动性能差的特点,为了在较短的位置伺服周期内(110μs)抑制工作台上的线缆扰动以及直线电机推力波动的影响,提高工作台的轨迹跟踪精度,采用了基于精密工作台名义模型的方法设计扰动观测器,构成PD+扰动观测器的运动控制结构。通过实验,与没有扰动观测器的PD控制相比较,工作台静态定位精度提高了0.3μm,以120 mm/s匀速运动时工作台的轨迹跟踪精度提高了2μm。结果表明,该控制方法计算量小,抑制外部扰动效果好,有利于工作台综合性能的提高。; The precision stage driven by a linear-motor and sustained by air-bearing tracks has the characteristics of zero mechanical damping and weak anti-disturbance.In order to block disturbance introduced by cable on the stage and by the thrust fluctuation of the linear-motor within the short period of the servo cycle(110 μs) and to enhance the tracking accuracy of the stage,we propose a disturbance observer based on the nominal model of the precision stage,forming the motion control architecture based on a PD plus disturbance observer.During check experiments,compared with the PD control without any disturbance observers,the static positioning accuracy of the stage increases 0.3 μm,while the tracking accuracy increases 2 μm at the uniform speed of 120 mm/s.The results show that the proposed algorithm can control the external disturbance effectively and is rather simple.It can be used to enhance the comprehensive performance of the stage.; 国家863项目(2001AA423260)资助 |
| 语种 | 中文 ; 中文 |
| 内容类型 | 期刊论文 |
| 源URL | [http://hdl.handle.net/123456789/49785]  |
| 专题 | 清华大学 |
| 推荐引用方式 GB/T 7714 | 杨开明,叶佩青,游华云,等. 直线电机精密工作台扰动观测器设计[J],2010, 2010. |
| APA | 杨开明.,叶佩青.,游华云.,褚毅成.,Yang Kaiming.,...&Chu Yicheng.(2010).直线电机精密工作台扰动观测器设计.. |
| MLA | 杨开明,et al."直线电机精密工作台扰动观测器设计".(2010). |
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