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	柔性铰链微位移机构在可调谐F-P滤波器中的应用研究
	王明明 ; 张连清 ; 李营 ; 张书练 ; 李湘培 ; WANG Ming-ming ; ZHANG Lian-qing ; LI Ying ; ZHANG Shu-lian ; LEE Sang-bae
	2010-06-08 ; 2010-06-08
关键词	可调谐F-P滤波器 柔性铰链 微位移机构 压电陶瓷致动器 tunable F-P filters flexible hinge micro-displacement mechanism piezoelectric actuator TN713
其他题名	Study on application of flexible hinge micro-displacement mechanism in tunable F-P filters
中文摘要	分析了由于反射镜倾斜导致的可调谐F-P(Fabry-Perot)滤波器失谐。设计了一种柔性铰链式微位移机构,由压电陶瓷驱动,采用平行四连杆机构进行传动导向。采用该机构驱动F-P腔镜扫描克服了直接使用压电陶瓷带来的腔镜倾斜问题。该机构已应用于可调谐F-P滤波器中,输出信号多周期峰值幅度均匀,重复性好。; The output signal distortion of tunable F-P filters caused by the F-P cavity mirror tilt was analyzed.Using a parallel linkage flexible hinge as a guide translator,a micro-displacement mechanism which was driven by a piezoelectric actuator was designed.Using the mechanism the F-P filter distortion problem generated by its cavity mirror tilt was solved when the scan mirror was pushed to move by the piezoelectric actuator directly.By this way,the uniformity of peak amplitudes of output by the tunable F-P filter is greatly improved in several periods.The mechanism has been successfully applied to the tunable F-P filter. The experiment shows the repeatability of the tunable F-P filter is remarkably improved.
语种	中文 ; 中文
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/49600]
专题	清华大学
推荐引用方式 GB/T 7714	王明明,张连清,李营,等. 柔性铰链微位移机构在可调谐F-P滤波器中的应用研究[J],2010, 2010.
APA	王明明.,张连清.,李营.,张书练.,李湘培.,...&LEE Sang-bae.(2010).柔性铰链微位移机构在可调谐F-P滤波器中的应用研究..
MLA	王明明,et al."柔性铰链微位移机构在可调谐F-P滤波器中的应用研究".(2010).

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