| 微机电系统中的微观黏滑、黏附与控制 | |
| 张向军 ; 孟永钢 ; 温诗铸 ; ZHANG Xiang-jun ; MENG Yong-gang ; WEN Shi-zhu | |
| 2010-06-08 ; 2010-06-08 | |
| 关键词 | 微机电系统 微观摩擦 黏滑 黏附 microelectromechanical system micro tribology stick-slip stiction TH703 |
| 其他题名 | Control of Micro Stick-Slip and Stiction in MEMS |
| 中文摘要 | 微观黏滑和黏附失效是微机电系统中的常见现象,该现象主要是由于受包括静电力、范德华力及毛细力等各种表面力所起的主导作用而产生的.采用黏着接触理论和运动分析方法,得到了微观摩擦试验中黏滑出现的无量纲黏滑数,表微观黏滑是接触表面特性、形貌参数、接触载荷及滑动速度等综合作用的结果,进而获得黏滑现象的各种临界参数,提出了黏滑行为控制的表面修饰与形貌设计依据;针对微构件的黏附失效,采用Laplace公式并结合微构件的变形分析,探究了毛细力作用下微构件的变形特征与失稳行为,发现其变形过程中存在着不稳定的临界点,对应黏附行为的发生,进而提出了微构件防黏附的结构设计.; Micro stick-slip and stiction failure are familiar phenomena in microelectromechanical systems due to the dominant role of various surface forces including electrostatic force, van der Waals force and capillary force. Based on adhesion contact model, a dimensionless stick-slip number is proposed, which implies that micro stick-slip behavior results from a comprehensive function of surface properties, topography, contact load and sliding velocity. Therefore, critical parameters of micro stick-slip are obtained as well as the control measures, in which a proper design of wave length of topography is suggested. Additionally, capillary force-induced stiction behavior is investigated based on deformation of a micro cantilever, critical point of stiction is obtained, which provides structure design principle for the avoidance of stiction of micro cantilever.; 国家自然科学基金重点项目(50135040); 国家自然科学基金青年科学基金项目(50305014). |
| 语种 | 中文 ; 中文 |
| 内容类型 | 期刊论文 |
| 源URL | [http://hdl.handle.net/123456789/48757]  |
| 专题 | 清华大学 |
| 推荐引用方式 GB/T 7714 | 张向军,孟永钢,温诗铸,等. 微机电系统中的微观黏滑、黏附与控制[J],2010, 2010. |
| APA | 张向军,孟永钢,温诗铸,ZHANG Xiang-jun,MENG Yong-gang,&WEN Shi-zhu.(2010).微机电系统中的微观黏滑、黏附与控制.. |
| MLA | 张向军,et al."微机电系统中的微观黏滑、黏附与控制".(2010). |
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