Two-Dimensional Stress Measurement of a Micromachined Piezoresistive Structure with Micro-Raman Spectroscopy

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	Two-Dimensional Stress Measurement of a Micromachined Piezoresistive Structure with Micro-Raman Spectroscopy
	Qian J(钱劲); Yu TX(余同希); Zhao YP(赵亚溥)
刊名	Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems
	2005
通讯作者邮箱	yzhao@lnm.imech.ac.cn
卷号	11 期号:2-3 页码:97-103
ISSN号	0946-7076
通讯作者	Zhao, YP (reprint author), Chinese Acad Sci, State Key Lab Nonlinear Mech LNM, Inst Mech, Beijing 100080, Peoples R China.
中文摘要	This paper describes the stress characterization of a cantilever structure of a piezoresistive microflowmeter using micro-Raman spectroscopy. In order to obtain the relationship between the stress and the shift of Raman frequency, the mechanical stress in the structure was assumed to be uniaxial according to the applied loading and the boundary conditions. Also, the two-dimensional stress distribution of the structure was simulated using a finite element tool (ABAQUS v 6.2). The experimental results agree well to those predicted by the finite element simulation. It is concluded that micro-Raman spectroscopy is an accurate, non-destructive technique for measuring Microelectromechanical systems (MEMS) local stress with micrometer spatial resolution.
学科主题	力学
类目[WOS]	Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
研究领域[WOS]	Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics
关键词[WOS]	MECHANICAL-STRESS ; SILICON ; PARAMETERS ; DIAMOND ; DEVICES ; GAP
收录类别	SCI
语种	英语
WOS记录号	WOS:000226664900005
公开日期	2007-06-15 ; 2007-12-05 ; 2009-06-23
内容类型	期刊论文
源URL	[http://dspace.imech.ac.cn/handle/311007/15425]
专题	力学研究所_力学所知识产出(1956-2008)
推荐引用方式 GB/T 7714	Qian J,Yu TX,Zhao YP. Two-Dimensional Stress Measurement of a Micromachined Piezoresistive Structure with Micro-Raman Spectroscopy[J]. Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems,2005,11(2-3):97-103.
APA	钱劲,余同希,&赵亚溥.(2005).Two-Dimensional Stress Measurement of a Micromachined Piezoresistive Structure with Micro-Raman Spectroscopy.Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems,11(2-3),97-103.
MLA	钱劲,et al."Two-Dimensional Stress Measurement of a Micromachined Piezoresistive Structure with Micro-Raman Spectroscopy".Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems 11.2-3(2005):97-103.