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	The oxidation behaviour of Ce-implanted ZrN coating
	Zhou, Q.G. ; Bai, X.D. ; Xue, X.Y. ; Ling, Y.H. ; Chen, X.W. ; Xu, J. ; Wang, D.R.
	2010-05-10 ; 2010-05-10
关键词	Experimental/ cerium ion implantation oxidation stoichiometry surface composition thin films X-ray diffraction X-ray photoelectron spectra zirconium compounds/ oxidation properties Ce implanted ZrN coating cerium ion implantation cathodic arc deposition MEVVA ion implanter weight gain measurement oxidation resistance oxidation rate X-ray photoelectron spectra glancing angle X-ray diffraction valence states phase composition oxidation layers XPS XRD surface composition 500 degC 40 kV ZrN:Ce/ A8160D Surface treatment and degradation of ceramics and refractories A6170T Doping and implantation of impurities A6855 Thin film growth, structure, and epitaxy A6820 Solid surface structure A7960E Photoelectron spectra of semiconductors and insulators A8280P Electron spectroscopy for chemical analysis (photoelectron, Auger spectroscopy, etc.) A7960 Photoemission and photoelectron spectra (condensed matter) A6480E Stoichiometry and homogeneity/ temperature 7.73E+02 K voltage 4.0E+04 V/ ZrN:Ce/ss Ce/ss Zr/ss N/ss ZrN/bin Zr/bin N/bin Ce/el Ce/dop
中文摘要	The aim of the study was to investigate the influence of cerium ion implantation on the oxidation behavior of ZrN coating. Samples was deposited by cathodic arc deposition and subsequently implanted with different doses of cerium using a MEVVA ion implanter. The ions were extracted with a voltage of 40 kV, and the dose ranged from 5*10 /sup 16/ to 2*10/sup 17/ ions/cm/sup 2/. The air oxidation behaviors at 500 degrees C of as-deposited and Ce-implanted ZrN coatings were characterized by weight gain measurement. The oxidation resistance of ZrN coating reduced after implantation with cerium at low dose but rebounded at higher dose. The oxidation rate of ZrN coatings were 2.18*10/sup -7/, 5.21*10/sup -8/, 4.18*10/sup -7/ and 1.56*10/sup -7/ mg/sup 2/ cm/sup -4/ s/sup -1/ with dose of 0, 5*10/sup 16/, 1*10/sup 17/ and 2*10/sup 17/ ions/cm/sup 2/. X-ray photoelectron spectroscopy and glancing angle X-ray diffraction were employed to analyze the valence states of the oxide scale and the phase composition of the oxidation layers, respectively. Cerium implantation could improve the oxidation resistance of ZrN coating with higher dose. Finally, the mechanism of the oxidation behavior is discussed.
语种	英语 ; 英语
出版者	Elsevier ; Netherlands
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/21902]
专题	清华大学
推荐引用方式 GB/T 7714	Zhou, Q.G.,Bai, X.D.,Xue, X.Y.,et al. The oxidation behaviour of Ce-implanted ZrN coating[J],2010, 2010.
APA	Zhou, Q.G..,Bai, X.D..,Xue, X.Y..,Ling, Y.H..,Chen, X.W..,...&Wang, D.R..(2010).The oxidation behaviour of Ce-implanted ZrN coating..
MLA	Zhou, Q.G.,et al."The oxidation behaviour of Ce-implanted ZrN coating".(2010).

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