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	A disk-pivot structure micro piezoelectric actuator using vibration mode /i B//sub 11/
	Xiangcheng Chu ; Long Ma ; Longtu Li
	2010-05-10 ; 2010-05-10
关键词	Practical Experimental/ finite element analysis microactuators piezoelectric actuators stators ultrasonic motors vibration measurement vibrations/ disk-pivot structure micropiezoelectric actuator vibration mode B/sub 11/ nodal circles nodal diameters wobble type ultrasonic motor piezoelectric rod piezoelectric cylinder piezoelectric disc wobble mode excitation metal cylinder stator metal rod rotor low drive voltage micromation wobble state control stator structure finite element analysis B/sub 11/ resonant frequency laser vibrometer impedance analyzer rotation speed precise instrumentation bioengineering microactuator systems 45.7 kHz 49.03 kHz 14 mm/ B2860A Piezoelectric devices B8340C Piezoelectric motors B2575D Design and modelling of micromechanical devices/ frequency 4.57E+04 Hz frequency 4.903E+04 Hz size 1.4E-02 m
中文摘要	Micro piezoelectric actuator using vibration mode /i B//sub 11 / (/i B//sub mn/, where /i m/ is the number of nodal circles, /i n/ is the nodal diameters) is designed. Different from conventional wobble-type ultrasonic motor using piezoelectric rod or cylinder, piezoelectric disc is used to excite wobble modes and metal cylinder stator is used to amplify the transverse displacement, metal rod rotor is actuated to rotate. The outer diameter of the actuator is 14mm. There are features such as low drive voltage, micromation, and convenient control of wobble state by modifying the structure of stator, etc. Finite element analysis (FEA) of the stator has been made. It is found that the resonant frequency of vibration mode /i B//sub 11/ is 49.03kHz, which is measured at 45.7kHz by the laser vibrometer and impedance analyzer. The rotation speed has been measured, which could be as high as 10,071rpm under an alternating current 100V. Such piezoelectric actuator can be optimized and adjusted to fit practical conditions. It can be applied in the fields of precise instrument, bioengineering and other micro actuator system. [All rights reserved Elsevier].
语种	英语 ; 英语
出版者	Elsevier ; Netherlands
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/21294]
专题	清华大学
推荐引用方式 GB/T 7714	Xiangcheng Chu,Long Ma,Longtu Li. A disk-pivot structure micro piezoelectric actuator using vibration mode /i B//sub 11/[J],2010, 2010.
APA	Xiangcheng Chu,Long Ma,&Longtu Li.(2010).A disk-pivot structure micro piezoelectric actuator using vibration mode /i B//sub 11/..
MLA	Xiangcheng Chu,et al."A disk-pivot structure micro piezoelectric actuator using vibration mode /i B//sub 11/".(2010).

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