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	Femtosecond laser two-photon microfabrication control and monitoring system based on virtual instruments
	Gao Guohua ; Zhu Yu ; Duan Guanghong ; Zhang Ming
	2010-05-10 ; 2010-05-10
会议名称	International Technology and Innovation Conference 2006. ITIC 2006 ; International Technology and Innovation Conference 2006. ITIC 2006 ; Hangzhou, China ; INSPEC
关键词	Practical/ computer vision data acquisition laser beam machining micromachining micromechanical devices two-photon processes virtual instrumentation/ femtosecond laser two-photon microfabrication control virtual instruments 3D microstructure fabricating method submicron resolution power pulse energy photopolymerization two-photon absorption LabVIEW machining system microdisplacement driver position data acquisition program machine vision conception vision monitoring system machining defects machining accuracy user friendly interface/ B2575F Fabrication of micromechanical devices C7480 Production engineering computing C7410H Computerised instrumentation C5260B Computer vision and image processing techniques E3644V Mechatronics industry E0410D Industrial applications of IT E1520A Machining E1640 Instrumentation E2160 Micromechanics (mechanical engineering)
中文摘要	Femtosecond (fs) laser two-photon microfabrication is a new true 3D microstructure fabricating method with sub-micron resolution power based on the characteristic of fs laser that ultrahigh peak intensity can be achieved at low pulse energy, and the photopolymerization induced by two-photon absorption can be tightly confined in one limited focus. According to the elementary idea of this fabricating method, a control and monitoring system developed in the Virtual Instruments environment, LabVIEW, is proposed in this paper. In order to ensure the movement accuracy of the machining system that is the crucial factor influencing the figure error of the final 3D microstructures, a micro displacement driver and position data acquisition program is designed. Through the error compensation, the minimum error of the actual processing track from design track can be obtained. Based on machine vision conception, a vision monitoring system is used to acquire the image of the single polymerization layer, find the machining defects and obtain the compensation data. Integral control and monitoring system improves the machining accuracy and has user friendly interface.
会议录出版者	Inst. of Eng. and Technol ; Stevenage, UK
语种	英语 ; 英语
内容类型	会议论文
源URL	[http://hdl.handle.net/123456789/19278]
专题	清华大学
推荐引用方式 GB/T 7714	Gao Guohua,Zhu Yu,Duan Guanghong,et al. Femtosecond laser two-photon microfabrication control and monitoring system based on virtual instruments[C]. 见:International Technology and Innovation Conference 2006. ITIC 2006, International Technology and Innovation Conference 2006. ITIC 2006, Hangzhou, China, INSPEC.

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