| Dielectric properties of LTCC system of Al2O3 and borosilicate glass | |
| Liu, Yang ; Wang, Yan ; Ma, Jusheng | |
| 2010-05-10 ; 2010-05-10 ; OCT 23-26, 2005 | |
| 会议名称 | High-Performance Ceramics IV, Pts 1-3 ; 4th China International Conference on High-Performance Ceramics (CICC-4) ; Chengdu, PEOPLES R CHINA ; Web of Science |
| 关键词 | LTCC dielectric constant submicron powder Al2O3 Materials Science, Ceramics Materials Science, Composites |
| 中文摘要 | In this paper, three types of Al2O3 powders with different sizes (1.6 mu m, 0.7 mu m, and 0.3 mu m) were used in a LTCC system of Al2O3 and borosilicate glass (BSG). Al2O3 and BSG are selected on account of their coefficient of thermal expansion (CTE) similar to silicon, which can reduce thermal stress. It was found that the dielectric constant, epsilon, of substrates drops with the decrease of Al2O3 powder size. E; increases with the increase of Al2O3 content for the sample with 1.6 mu m Al2O3 powder, but decreases with the increase of Al2O3 content for the samples with 0.7 mu m and 0.3 mu m Al2O3 powders. SEM observations revealed that more pores with low permittivity appeared for the samples with smaller Al2O3 powders, resulting in the drop of dielectric constant of the sample finally. |
| 会议录出版者 | TRANS TECH PUBLICATIONS LTD ; STAFA-ZURICH ; LAUBLSRUTISTR 24, CH-8717 STAFA-ZURICH, SWITZERLAND |
| 语种 | 英语 ; 英语 |
| 内容类型 | 会议论文 |
| 源URL | [http://hdl.handle.net/123456789/17995]  |
| 专题 | 清华大学 |
| 推荐引用方式 GB/T 7714 | Liu, Yang,Wang, Yan,Ma, Jusheng. Dielectric properties of LTCC system of Al2O3 and borosilicate glass[C]. 见:High-Performance Ceramics IV, Pts 1-3, 4th China International Conference on High-Performance Ceramics (CICC-4), Chengdu, PEOPLES R CHINA, Web of Science. |
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