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	Active damping of a piezoelectric MEMS acoustic sensor
	Wu, XM ; Ren, TL ; Liu, LT
	2010-05-07 ; 2010-05-07
会议名称	INTEGRATED FERROELECTRICS ; 17th International Symposium on Integrated Ferroelectrics ; Shanghai, PEOPLES R CHINA ; Web of Science
关键词	MECHANISMS Engineering, Electrical & Electronic Physics, Applied Physics, Condensed Matter
中文摘要	This paper presents the fabrication process and active damping strategy of piezoelectric MEMS acoustic sensor by combining two functions of sensing and actuation of the PZT film in one device. The electric characteristics of PZT film were determined by measurement. Simulation of self-sensing control law, and control circuit are introduced. Important issues of the implementation of closed loop damping control are discussed. Experiment results show that the self-sensing damping of piezoelectric MEMS acoustic sensor is implemented successfully. This technology is more promising in improving the dynamic performance of piezoelectric MEMS devices because very low driven voltage and power consuming are sufficient.
会议录出版者	TAYLOR & FRANCIS LTD ; ABINGDON ; 4 PARK SQUARE, MILTON PARK, ABINGDON OX14 4RN, OXON, ENGLAND
语种	英语 ; 英语
内容类型	会议论文
源URL	[http://hdl.handle.net/123456789/16914]
专题	清华大学
推荐引用方式 GB/T 7714	Wu, XM,Ren, TL,Liu, LT. Active damping of a piezoelectric MEMS acoustic sensor[C]. 见:INTEGRATED FERROELECTRICS, 17th International Symposium on Integrated Ferroelectrics, Shanghai, PEOPLES R CHINA, Web of Science.

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