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	Temperature dependences of optical properties;chemical composition;structure;and laser damage in Ta_2O_5 films
	Xu C(许程) ; Yang S(杨帅) ; Zhang SH(张生辉) ; Niu JN(牛继南) ; Qiang YH(强颖怀) ; Liu JT(刘炯天) ; Li DW(李大伟)
	2015-08-31 ; 2015-08-31
关键词	Ta2O5 film laser damage deposition annealing
中文摘要	Ta2O5 films are prepared by e-beam evaporation with varied deposition temperatures,annealing temperatures,and annealing times.The effects of temperature on the optical properties,chemical composition,structure,and laserinduced damage threshold(LIDT) are systematically investigated.The results show that the increase of deposition temperature decreases the film transmittance slightly,yet annealing below 923 K is beneficial for the transmittance.The XRD analysis reveals that the film is in the amorphous phase when annealed below 873 K and in thehexagonal phase when annealed at 1073 K.While an interesting near-crystalline phase is found when annealed at 923 K.The LIDT increases with the deposition temperature increasing,whereas it increases firstly and then decreases as the annealing temperature increases.In addition,the increase of the annealing time from 4 h to 12 h is favourable to improving the LIDT,which is mainly due to the improvement of the O/Ta ratio.The highest LIDT film is obtained when annealed at 923 K,owing to the lowest density of defect.
内容类型	期刊论文
源URL	[http://ir.calis.edu.cn/hdl/232060/10479]
专题	中国矿业大学（徐州）
推荐引用方式 GB/T 7714	Xu C,Yang S,Zhang SH,et al. Temperature dependences of optical properties;chemical composition;structure;and laser damage in Ta_2O_5 films[J],2015, 2015.
APA	许程.,杨帅.,张生辉.,牛继南.,强颖怀.,...&李大伟.(2015).Temperature dependences of optical properties;chemical composition;structure;and laser damage in Ta_2O_5 films..
MLA	许程,et al."Temperature dependences of optical properties;chemical composition;structure;and laser damage in Ta_2O_5 films".(2015).

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