Low-temperature deposition of VO2 films with high crystalline degree by embedding multilayered structure

CORC > 上海硅酸盐研究所 > 中国科学院上海硅酸盐研究所 > 古陶瓷与工业陶瓷工程研究中心 > 期刊论文

	Low-temperature deposition of VO2 films with high crystalline degree by embedding multilayered structure
	Sun, Guangyao 1; Cao, Xun 1; Li, Xiaoyan 3; Bao, Shanhu 1; Li, Ning 1; Liang, Mengshi 1; Gloter, Alexandre 2; Gu, Hui 1; Jin, Ping 1,3
刊名	SOLAR ENERGY MATERIALS AND SOLAR CELLS
	2017-03-01
卷号	161 页码:70-76
关键词	Low temperature deposition Vanadium dioxide Multilayer structure Epitaxial High degree of crystallinity Smart window
英文摘要	It is a long-standing challenge in the fabrication of single-phase VO2 films at low temperature on Si substrate or glass substrate due to their thermodynamic phase-instability and the polymorphic structures. Recently, the demand for high-quality thin films deposited at low temperature is strongly pushed by their applications on devices and smart windows. Thermochromic films of VO2, as well as multilayer films of VO2/ZnO and VO2/ TiO2/ZnO, were made by magnetron sputtering method and characterized by X-ray diffraction (XRD), atomic force microscopy (AFM), UV-visible-NIR spectrophotometer, (scanning) transmission electron microscopy ((S) TEM) and Electron energy loss spectroscopy (EELS). Films with high crystalline degree VO2 single crystal phase were obtained at a fairly low temperature of 300 degrees C without subsequent annealing by embedding ZnO and TiO2 layers between VO2 and substrates. It is demonstrated that VO2/TiO2/ZnO films could display higher luminous transmittance and better semiconductor to metal transition (SMT) performance. Our data can serve a promising point for industrial production with high degree of crystallinity at a low temperature.
WOS标题词	Science & Technology ; Technology ; Physical Sciences
类目[WOS]	Energy & Fuels ; Materials Science, Multidisciplinary ; Physics, Applied
研究领域[WOS]	Energy & Fuels ; Materials Science ; Physics
关键词[WOS]	METAL PHASE-TRANSITION ; THIN-FILMS ; THERMOCHROMIC PROPERTIES ; SMART WINDOWS ; GROWTH ; SEMICONDUCTOR ; NANOPARTICLES ; TRANSPARENT ; PERFORMANCE ; DIOXIDE
收录类别	SCI
语种	英语
WOS记录号	WOS:000393347000009
内容类型	期刊论文
源URL	[http://ir.sic.ac.cn/handle/331005/23491]
专题	上海硅酸盐研究所_古陶瓷与工业陶瓷工程研究中心_期刊论文
作者单位	1.Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, Dingxi 1295, Shanghai 200050, Peoples R China 2.Univ Paris 11, Lab Phys Solides, Bat 510, F-91405 Orsay, France 3.Natl Inst Adv Ind Sci & Technol, Mat Res Inst Sustainable Dev, Nagoya, Aichi 4638560, Japan
推荐引用方式 GB/T 7714	Sun, Guangyao,Cao, Xun,Li, Xiaoyan,et al. Low-temperature deposition of VO2 films with high crystalline degree by embedding multilayered structure[J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS,2017,161:70-76.
APA	Sun, Guangyao.,Cao, Xun.,Li, Xiaoyan.,Bao, Shanhu.,Li, Ning.,...&Jin, Ping.(2017).Low-temperature deposition of VO2 films with high crystalline degree by embedding multilayered structure.SOLAR ENERGY MATERIALS AND SOLAR CELLS,161,70-76.
MLA	Sun, Guangyao,et al."Low-temperature deposition of VO2 films with high crystalline degree by embedding multilayered structure".SOLAR ENERGY MATERIALS AND SOLAR CELLS 161(2017):70-76.