3D-Printing of inverted pyramid suspending architecture for pyroelectric infrared detectors with inhibited microphonic effect

CORC > 上海硅酸盐研究所 > 中国科学院上海硅酸盐研究所 > 无机功能材料与器件重点实验室 > 期刊论文

	3D-Printing of inverted pyramid suspending architecture for pyroelectric infrared detectors with inhibited microphonic effect
	Xu, Qing 1,2; Zhao, Xiangyong 1; Li, Xiaobing 1; Deng, Hao 1; Yan, Hong 1; Yang, Linrong 1,2; Di, Wenning 1; Luo, Haosu 1; Neumann, Norbert 3
刊名	INFRARED PHYSICS & TECHNOLOGY
	2016-05-01
卷号	76 页码:111-115
关键词	3D-Printing Suspending architecture Pyroelectric devices Microphonic effect Figure of merit
英文摘要	A sensitive chip with ultralow dielectric loss based on Mn doped PMNT (71/29) has been proposed for high-end pyroelectric devices. The dielectric loss at 1 kHz is 0.005%, one order lower than the minimum value reported so far. The detective figure of merit (Fa) is up to 92.6 x 10(-5) Pa-1/2 at 1 kHz and 53.5 x 10(-5) Pa-1/2 at 10 Hz, respectively. In addition, an inverted pyramid suspending architecture for supporting the sensitive chip has been designed and manufactured by 3D printing technology. The combination of this sensitive chip and the proposed suspending architecture largely enhances the performance of the pyroelectric detectors. The responsivity and specific detectivity are 669,811 V/W and 3.32 x 10(9) cm Hz(1/2)/W at 10 Hz, respectively, 1.9 times and 1.5 times higher than those of the highest values in literature. Furthermore, the microphonic effect can be largely inhibited according to the theoretical and experimental analysis. This architecture will have promising applications in high-end and stable pyroelectric infrared detectors. (C) 2016 Elsevier B.V. All rights reserved.
WOS标题词	Science & Technology ; Technology ; Physical Sciences
类目[WOS]	Instruments & Instrumentation ; Optics ; Physics, Applied
研究领域[WOS]	Instruments & Instrumentation ; Optics ; Physics
关键词[WOS]	SINGLE-CRYSTALS ; NANOWIRES ; NANOGENERATOR ; MECHANISMS
收录类别	SCI
语种	英语
WOS记录号	WOS:000377725100013
内容类型	期刊论文
源URL	[http://ir.sic.ac.cn/handle/331005/22968]
专题	上海硅酸盐研究所_无机功能材料与器件重点实验室_期刊论文
作者单位	1.Chinese Acad Sci, Shanghai Inst Ceram, Key Lab Inorgan Funct Mat & Device, Shanghai 201800, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 3.InfraTec GmbH Infrarotmesstech & Sensor, D-01217 Dresden, Germany
推荐引用方式 GB/T 7714	Xu, Qing,Zhao, Xiangyong,Li, Xiaobing,et al. 3D-Printing of inverted pyramid suspending architecture for pyroelectric infrared detectors with inhibited microphonic effect[J]. INFRARED PHYSICS & TECHNOLOGY,2016,76:111-115.
APA	Xu, Qing.,Zhao, Xiangyong.,Li, Xiaobing.,Deng, Hao.,Yan, Hong.,...&Neumann, Norbert.(2016).3D-Printing of inverted pyramid suspending architecture for pyroelectric infrared detectors with inhibited microphonic effect.INFRARED PHYSICS & TECHNOLOGY,76,111-115.
MLA	Xu, Qing,et al."3D-Printing of inverted pyramid suspending architecture for pyroelectric infrared detectors with inhibited microphonic effect".INFRARED PHYSICS & TECHNOLOGY 76(2016):111-115.