Reducing stick-slip motion in one-dimensional nano manipulation by real-time feedback control

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	Reducing stick-slip motion in one-dimensional nano manipulation by real-time feedback control
	Zhang, Jing; Mou L(缪磊); Wu, Rebing; Xi N(席宁); Li, Chunwen; Wang YC(王越超); Tarn, Tzyh Jong
	2010
会议名称	2010 10th IEEE International Conference on Nanotechnology and Joint Symposium with Nano Korea 2010 KINTEX (IEEE-NANO 2010)
会议日期	August 17-20, 2010
会议地点	Ilsan, Gyeonggi-Do, Korea
页码	826-830
通讯作者	Zhang, Jing
中文摘要	When a micro cantilever with a nanoscale tip is manipulated on a substrate with atomic roughness, e.g., pushing an atomic-scale sample or etching the surface of the substrate to draw desired patterns, the periodical lateral frictional forces with stochastic fluctuations will induce stick-slip motion of the cantilever tip, which may greatly influence the precision of the nano manipulation. To reduce such a stick-slip motion, we propose a feedback control strategy based on the position estimation of the cantilever tip to compensate the periodical frictional force. Numerical simulations show that the motion of the cantilever tip under feedback control can track the desired trajectory asymptotically. Our proposal can aL be extended to the case when the cantilever tip moves over a Gaussian-shape defection on the substrate and when the stochastic fluctuations in the lateral force are with non-zero correlation time.
收录类别	EI
产权排序	2
会议录	2010 10th IEEE Conference on Nanotechnology, NANO 2010
会议录出版者	IEEE Computer Society
会议录出版地	Piscataway, NJ, USA
语种	英语
ISBN号	978-1-4244-7033-4
内容类型	会议论文
源URL	[http://ir.sia.cn/handle/173321/20047]
专题	沈阳自动化研究所_机器人学研究室
推荐引用方式 GB/T 7714	Zhang, Jing,Mou L,Wu, Rebing,et al. Reducing stick-slip motion in one-dimensional nano manipulation by real-time feedback control[C]. 见:2010 10th IEEE International Conference on Nanotechnology and Joint Symposium with Nano Korea 2010 KINTEX (IEEE-NANO 2010). Ilsan, Gyeonggi-Do, Korea. August 17-20, 2010.