Influence of hydrogen on the properties of titanium doped hydrogenated amorphous silicon prepared by sputtering

	Influence of hydrogen on the properties of titanium doped hydrogenated amorphous silicon prepared by sputtering
	Tianwei Zhou ; Yuhua Zuo ; Kai Qiu ; Jun Zheng ; Qiming Wang
刊名	vacuum
	2016
卷号	125 页码:93-97
学科主题	光电子学
收录类别	SCI
公开日期	2017-03-10
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/27812]
专题	半导体研究所_光电子研究发展中心
推荐引用方式 GB/T 7714	Tianwei Zhou,Yuhua Zuo,Kai Qiu,et al. Influence of hydrogen on the properties of titanium doped hydrogenated amorphous silicon prepared by sputtering[J]. vacuum,2016,125:93-97.
APA	Tianwei Zhou,Yuhua Zuo,Kai Qiu,Jun Zheng,&Qiming Wang.(2016).Influence of hydrogen on the properties of titanium doped hydrogenated amorphous silicon prepared by sputtering.vacuum,125,93-97.
MLA	Tianwei Zhou,et al."Influence of hydrogen on the properties of titanium doped hydrogenated amorphous silicon prepared by sputtering".vacuum 125(2016):93-97.