Influence of thermal annealing on optical properties and surface morphology of NiOx thin films

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 高密度光存储技术实验室

	Influence of thermal annealing on optical properties and surface morphology of NiOx thin films
	Zhou Ying ; Geng Yongyou ; Gu DH(顾冬红)
刊名	mater. lett.
	2007
卷号	61 页码:2482
关键词	NiOx films annealing optical properties surface morphology optical recording
ISSN号	0167-577x
中文摘要	niox thin films were deposited by reactive dc-magnetron sputtering from a nickel metal target in ar + o-2 with the relative o-2 content of 5%. thermal annealing effects on optical properties and surface morphology of niox, films were investigated by x-ray photoelectron spectroscopy, thermogravimetric analysis, scanning electron microscope and optical measurement. the results showed that the changes in optical properties and surface morphology depended on the temperature. the surface morphology of the films changed obviously as the annealing temperature increased due to the reaction niox -> nio + o-2 releasing o-2. the surface morphology change was responsible for the variation of the optical properties of the films. the optical contrast between the as-deposited films and 400 degrees c annealed films was about 52%. in addition, the relationship of the optical energy band gap with the variation of annealing temperature was studied. (c) 2006 elsevier b.v. all rights reserved.
学科主题	光存储
收录类别	EI
语种	英语
WOS记录号	WOS:000246158300091
公开日期	2009-09-22
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/3967]
专题	上海光学精密机械研究所_高密度光存储技术实验室
推荐引用方式 GB/T 7714	Zhou Ying,Geng Yongyou,Gu DH. Influence of thermal annealing on optical properties and surface morphology of NiOx thin films[J]. mater. lett.,2007,61:2482, 2485.
APA	Zhou Ying,Geng Yongyou,&顾冬红.(2007).Influence of thermal annealing on optical properties and surface morphology of NiOx thin films.mater. lett.,61,2482.
MLA	Zhou Ying,et al."Influence of thermal annealing on optical properties and surface morphology of NiOx thin films".mater. lett. 61(2007):2482.