Influence of temperature difference on surface figure controlling during continuous polishing

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 中科院强激光材料重点实验室

	Influence of temperature difference on surface figure controlling during continuous polishing
	Hong, Meijuan ; Xu, Xueke ; Dun, Aihuan ; Yang, Minghong ; Gao, Wenlan ; Wei, Chaoyang ; Liu, Shijie ; Shao, Jianda ; Zhang, Yang
	2015
会议名称	conference on optical manufacturing and testing xi
通讯作者	hong, mj (reprint author), chinese acad sci, shanghai inst opt & fine mech, 390 qinghe rd, shanghai 201800, peoples r china.
英文摘要	during continuous polishing, temperature is a significant source of processing uncertainty. three workpieces of different kind material (k9, nd: glass and ule) were polished on 2.4m continuous polisher. it turns out that temperature difference has different influence on different material workpieces. it also indicates that temperature difference aggravates the processing uncertainy. the deformat ion caused by temperature difference is simulated using ansys. it shows that, with top-bottom temperature difference of 0.1 degrees c, the deformat ion of nd: glass, k9 and ule are 0.444e(-6) m (about 0.7025 lambda), 0.249e(-6) m (about 0.3925 lambda), and 0.105e -8 m (about 0.00166 lambda), respectively. with radia l temperature difference of 0.1 degrees c, the deformation of nd: glass, k9 and ule are 0.831e(-7) m (about 0.1313 lambda), 0.465e(-7) m (about 0.07348 lambda) and 0.196e(-9) m (about 3.0973e(-4)lambda), respectively. to e xplore the top-bottom temperature difference and radial temperature difference along the polishing surface, a small aperture nd: glass and a large aperture nd: glass in pol ishing have been measured using thermal infrared imager. the results showed that for empty set 260 mm x 26 mm nd: glass, the radial temperature difference is about 0.1 degrees c, while the top-bottom temperature difference is about 0.1 degrees c similar to 0.21 degrees c. contrastively, for 810 mmx460 mmx40 mm nd: glass, the radial temperature difference have reached 0.4 degrees c, while top bottom temperature difference ranges between 0.1 degrees c similar to 0.27 degrees c. when element gets larger, it will suffer greater temperature difference. these temperature differences are great enough to cause deformation far beyond the polishing accuracy required. finally, methods are proposed to diminish the effect of temperature difference.
收录类别	CPCI
会议录	optical manufacturing and testing xi
会议录出版者	spie-int soc optical engineering
语种	英语
内容类型	会议论文
源URL	[http://ir.siom.ac.cn/handle/181231/17060]
专题	上海光学精密机械研究所_中科院强激光材料重点实验室
作者单位	1.[Hong, Meijuan 2.Xu, Xueke 3.Dun, Aihuan 4.Yang, Minghong 5.Gao, Wenlan 6.Wei, Chaoyang 7.Liu, Shijie 8.Shao, Jianda 9.Zhang, Yang] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 10.[Hong, Meijuan] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
推荐引用方式 GB/T 7714	Hong, Meijuan,Xu, Xueke,Dun, Aihuan,et al. Influence of temperature difference on surface figure controlling during continuous polishing[C]. 见:conference on optical manufacturing and testing xi.