Correction of Mid-spatial-frequency Errors by Smoothing in Spin Motion for CCOS

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 中科院强激光材料重点实验室

	Correction of Mid-spatial-frequency Errors by Smoothing in Spin Motion for CCOS
	Zhang, Yizhong ; Wei, Chaoyang ; Shao, Jianda ; Xu, Xueke ; Liu, Shijie ; Hu, Chen ; Zhang, Haichao ; Gu, Haojin
	2015
会议名称	conference on optical manufacturing and testing xi
通讯作者	zhang, yz (reprint author), chinese acad sci, shanghai inst opt & fine mech, key lab mat high power laser, shanghai 201800, peoples r china.
英文摘要	smoothing is a convenient and efficient way to correct mid-spatial-frequency errors. quantifying the smoothing effect allows improvements in efficiency for finishing precision optics. a series experiments in spin motion are performed to study the smoothing effects about correcting mid-spatial-frequency errors. some of them use a same pitch tool at different spinning speed, and others at a same spinning speed with different tools. introduced and improved shu's model to describe and compare the smoothing efficiency with different spinning speed and different tools. from the experimental results, the mid-spatial-frequency errors on the initial surface were nearly smoothed out after the process in spin motion and the number of smoothing times can be estimated by the model before the process. meanwhile this method was also applied to smooth the aspherical component, which has an obvious mid-spatial-frequency error after magnetorheological finishing processing. as a result, a high precision aspheric optical component was obtained with pv=0.1 lambda and rms=0.01 lambda.
收录类别	CPCI
会议录	optical manufacturing and testing xi
会议录出版者	spie-int soc optical engineering
语种	英语
内容类型	会议论文
源URL	[http://ir.siom.ac.cn/handle/181231/17058]
专题	上海光学精密机械研究所_中科院强激光材料重点实验室
作者单位	1.[Zhang, Yizhong 2.Wei, Chaoyang 3.Shao, Jianda 4.Xu, Xueke 5.Liu, Shijie 6.Hu, Chen 7.Zhang, Haichao 8.Gu, Haojin] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China
推荐引用方式 GB/T 7714	Zhang, Yizhong,Wei, Chaoyang,Shao, Jianda,et al. Correction of Mid-spatial-frequency Errors by Smoothing in Spin Motion for CCOS[C]. 见:conference on optical manufacturing and testing xi.