Phase shift of polarized light through sculptured thin films: Experimental measurements and theoretical study

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 中科院强激光材料重点实验室

	Phase shift of polarized light through sculptured thin films: Experimental measurements and theoretical study
	Hou Yong-Qiang ; Qi Hong-Ji ; Li Xu ; He Kai ; Yi Kui ; Shao Jian-Da
刊名	chin. phys. b
	2013
卷号	22 期号:12 页码:127801
通讯作者	qi, hj (reprint author), chinese acad sci, shanghai inst opt & fine mech, key lab mat high power laser, shanghai 201800, peoples r china.
英文摘要	a slanted columnar tio2 sculptured anisotropic thin film (atf) is prepared via the glancing angle deposition technique and used as the phase retardation plate. the tilted nanocolumn microstructures of thin film induce the optical anisotropy. with the biaxial birefringent model, the optical constants dispersion equations of tio2 atf are derived by fitting the transmittance spectra for s-and p-polarized waves measured at normal and oblique incidence within 400 nm-1200 nm. the phase shift of polarized light after reflection and/or transmission through the tio2 atf is analyzed with the characteristic matrix employing the extracted structure parameters. the theoretical studies reasonably well accord with the experimental results measured with spectroscopic ellipsometry. in addition, the dependences of the phase shift on the coating physical thickness and oblique incidence angle are also discussed. birefringence of the biaxial atf provides a sophisticated phase modulation by varying incidence angles over a broad range to have a wide-angle phase shift.
收录类别	SCI
语种	英语
内容类型	期刊论文
版本	出版稿
源URL	[http://ir.siom.ac.cn/handle/181231/14982]
专题	上海光学精密机械研究所_中科院强激光材料重点实验室
作者单位	1.[Hou Yong-Qiang 2.Qi Hong-Ji 3.Li Xu 4.He Kai 5.Yi Kui 6.Shao Jian-Da] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Laser, Shanghai 201800, Peoples R China 7.[Hou Yong-Qiang] Shanghai Huali Microelect Corp, Shanghai 201203, Peoples R China
推荐引用方式 GB/T 7714	Hou Yong-Qiang,Qi Hong-Ji,Li Xu,et al. Phase shift of polarized light through sculptured thin films: Experimental measurements and theoretical study[J]. chin. phys. b,2013,22(12):127801.
APA	Hou Yong-Qiang,Qi Hong-Ji,Li Xu,He Kai,Yi Kui,&Shao Jian-Da.(2013).Phase shift of polarized light through sculptured thin films: Experimental measurements and theoretical study.chin. phys. b,22(12),127801.
MLA	Hou Yong-Qiang,et al."Phase shift of polarized light through sculptured thin films: Experimental measurements and theoretical study".chin. phys. b 22.12(2013):127801.