| 题名 | 循环注液在环抛中的应用研究 |
| 作者 | 陈国凯 |
| 学位类别 | 硕士 |
| 答辩日期 | 2014 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 易葵 |
| 关键词 | 化学机械抛光，循环注液，激光玻璃，粒度，去除率，过滤 |
| 其他题名 | The applicational research of circulation slurry injection in annular polishing |
| 中文摘要 | 钕玻璃由于其特有的良好光谱特性，作为激光系统的增益介质，是当今大型高功率激光装置的核心元件。虽然化学机械抛光(CMP)技术目前已广泛应用于钕玻璃的冷加工过程中。但由于钕玻璃其特殊的物理性能，在实际生产过程中仍存在抛光效率低、加工质量重复性差、成品率低等问题，因此针对CMP过程的因素特别是抛光粉粒度及其他工艺因素对表面疵病的影响进行了深入研究，对于推动光学加工的进步具有重大的现实意义。本文围绕该领域内的这些核心问题，从以下几个方面开展了基础性研究： 对现有的传统抛光机进行了设计改造，设计了浸没式抛光系统和循环注液系统，并完成了系统的简单搭建，通过实验验证了系统的可行性。在循环注液平台上，基于粉体团聚的理论基础上，并结合实际抛光效果对抛光粉的大颗粒和团聚现象进行了详细的研究，对解决抛光粉的分散和稳定性问题以便提高抛光效果带来一定作用。 调研并完成一系列过滤介质的过滤实验，针对微滤膜这种过滤介质展开了细致的研究，进行了膜孔径的表征和微滤膜的分级过滤实验。另外学习和掌握了粒度仪的检测方法和粒度仪测试方法，利用粒度仪来表征抛光粉的粒度分布特性。 利用陪抛片完成了大口径钕玻璃片子的去除率测量并研究了相关影响因素，例如：粒度，铈含量，开槽方式等，结合先前已有的研究基础上提出一套适宜的抛光工艺，为实际工艺加工的进一步提高提供有利的帮助。 |
| 英文摘要 | Because of the specific character of spectrum，Nd-doped laser glasses as the medium of laser system, were the core components of NIF. Chemical mechanical polishing (CMP) was widely used in the polishing process of Nd-doped glass, but some problems still exist was actual CMP such as：low-level polishing efficiency, poor repetition of manufacturing quality, low ratio of end product, etc. Therefore the influence parameters especially the particle size and other manufacturing parameters aiming at CMP process and their effects to surface imperfection needed to be researched deeply, which meant a lot to the advance of optical manufacturing. This article concerned about these problems, carried out fundamental research of the following several aspects. We tried to take some equipment upgrading on the existing traditional polishing machine, had designed the immersion polishing system and circulation injection system. The simplified systems had been constructed, besides the feasibility of the system had been verified by experiment. Through the circulation injection system, a lot of detailed study had been taken on the lager particle and agglomeration phenomenon, which was based on the theoretical basis of agglomeration. These researches were tent to solve the problem of dispersion and the stability of slurry, which is benefit to improve the performance of polishing. Through a series of filtration experiments of filtration medium, detailed studies had been carried out, especially on microfiltration membrane. The characterization of membrane pore size and the grading microfiltration were also targeted to be carried out. Besides, we studied and mastered the testing method of particle size analyzer. The apparatus was used to measure the distribution of the particle size. In order to solve the measurement problem of the material remove mate (MRR) of large-aperture Nd-doped laser glass, a new method had been proposed by using a small sample called accompany polished flat for easier measurement. The influence parameters had been researched, such as: the particle size, the cerium concentration, and the groove shape and so on. Basing on the previous research results, an optimal polishing process had been had been proposed, which was benefit to the improvement of actual polishing process. |
| 语种 | 中文 |
| 内容类型 | 学位论文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/16842]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 陈国凯. 循环注液在环抛中的应用研究[D]. 中国科学院上海光学精密机械研究所. 2014. |
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