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题名	氮化钛薄膜及薄膜光伤与弱吸收测量技术
作者	金永浩
学位类别	硕士
答辩日期	2000
授予单位	中国科学院上海光学精密机械研究所
导师	邵建达
关键词	氮化钛薄膜 透射率 光学常数 损伤阈值 温度场
其他题名	Study on TiN Thin Films and Meterage System for Laser-induced Damage Threshold and Weak-absorption of Thin Films
中文摘要	该文第一部分正是以此为出发点,尝试以氮化钛为材料,以氮化钛薄膜的太阳能光谱选择性能为核心,通过不同的工艺手段及实验方法来研究其光学及电学性能.在国内首次采用贵金属掺杂的方法来改善氮化钛薄膜的光学及电学性能.成功地编写了计算薄膜光学常数的计算机应用程序,研究了不同组分的氮化钛薄膜的光学常数与工艺参数的关系.该文第二部分主要探讨的是光学薄膜测量技术的问题.重点放在了薄膜的激光损伤测量与薄膜的弱吸收测量技术的研究上.按照国际上关于薄膜激光损伤的测量标准,在原有的实验设施基础上,以计算机控制为核心,加上一些辅助电路设计,基本实现了一套自动化检测装置.改变了以往操作复杂、费时和耗人力的局面,并且提高了测量数据的可靠性.在弱吸收测量方面,设计出了双光路测量法,排除了探测激光波动给测量带来的噪声;采用光纤为中介进行间接探测,减小了通过电容、电感耦合给测量带来的干扰;在分析噪声来源的基础上,设计出低噪声的光电探测器电路;通过以上的改良措施,最终使总的背景噪声降低一个量级以上,从而提高了测量的灵敏度.
英文摘要	The paper studies on titanium nitride thin films and meterage system for laser induced Damage Threshold and Weak-absorption of Thin Films. The paper is focusing on titanium nitride thin film, as one of this paper's two topics, because the optically selective films, especially for the architectural applications, are diversifying and experiencing a growing market, meanwhile conventional solar control films and low-emissive films (called as heat mirror) can't meet various applications. It shows that TiN thin films can be a next-generation optically selective film. The paper investigated both on the performance of the materials and their manufacturing processes. The TiN thin films are manufactured under different deposition parameters with magnetron sputtering apparatus, and then are tested their solar spectral selectivity and optical and electrical properties. The modified optical and electrical properties of TiN films have been observed by doping noble metals. A powerful software for determining the optical constants of the absorption thin films is programmed, on which the relationship between the optical constants and process parameters were studied. Both DC and RF sputtering targets are adopted to preparing the TiN films, with the sputtered titanium material and the mixed sputtering gases of N2 and Ar. It shows that the properties of TiN thin films are sensitive to the N2 partial pressure and sputtering power and confirms that the stoichiometric TiN films have a good spectral solar selectivity. Improved properties of TiN thin films are obtained by applying a negative bias voltage in the deposition process and Ag-dopant. The effect of the thin film thickness on the optical and electrical properties of TiN thin films is analyzed as well as. The advanced meterage systems for laser-induced damage threshold and weak-absorption of the thin films are the other topic of this paper. According to international measurement criterion of laser-induced damage threshold (LIDT) of optical film, an automatic meterage system for LIDT is developed with a creditable stability and an easy-manipulation merit. The two light-paths method and low-noise photoelectric detector circuits are designed for the measurement of the ultra weak absorption, by which the background noise in the signals is deeply suppressed. The reliability and other merits of both systems are approved through the collated measurement results.
语种	中文
内容类型	学位论文
源URL	[http://ir.siom.ac.cn/handle/181231/16566]
专题	上海光学精密机械研究所_学位论文
推荐引用方式 GB/T 7714	金永浩. 氮化钛薄膜及薄膜光伤与弱吸收测量技术[D]. 中国科学院上海光学精密机械研究所. 2000.

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