| 题名 | 晶体性能综合测量系统的研究 |
| 作者 | 薄锋 |
| 学位类别 | 博士 |
| 答辩日期 | 2007 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 朱健强 |
| 关键词 | 消光比 半波电压 相位延迟 调制解调 综合性 全自动 |
| 其他题名 | The Research on an Integrated Measurement System for Crystal Performances |
| 中文摘要 | 随着激光器的出现和激光技术的发展，偏振光学日益广泛的应用于光纤通信技术、激光加工技术、光调制技术、光电检测技术以及光传感技术等领域中。晶体、波片及相关的偏光元件是激光技术和偏振光学中组成光学系统的最基本单元，在加工和使用这些偏光元件前对其进行精确测量是必不可少的一个环节和一个重要的研究课题。 晶体消光比、电光晶体半波电压和波片相位延迟是晶体材料作为偏光器件的三个非常重要的性能参数。消光比是衡量晶体材料性能的一个必不可少的参数，也是表征偏光棱镜性能的主要参数之一，它反映出晶体或偏光棱镜内部应力双折射的大小。消光比值测量的准确性直接影响晶体或偏光棱镜的研制、生产和应用，是科研和生产中亟待解决的一个课题。波片是基于晶体双折射性质的偏光器件，能使透过它的振动方向相互垂直的两束光波之间产生一定的相位差，改变光的偏振态，同其它偏光器件相配合，能够实现光各种偏振态的相互转换、偏振面的旋转及各类光波的调制。波片的相位延迟量和光轴精度是影响偏振光学、激光光学、光通信等系统质量的重要因素之一。半波电压是反应晶体电光效应的重要参数，根据半波电压值，可以确定利用电光效应控制透光强度所需的电压值，对于电光晶体而言，半波电压越小越好。 对晶体或偏光镜消光比、电光晶体半波电压和波片相位延迟的测量方法，各国都在积极的进行研究，但国内的研究还只是停留在对单个参数单独测量的实验室阶段，还没有适合晶体或波片的加工、生产现场的综合性测量系统。为此，本文研制出了一种晶体的静态消光比、电光晶体的静态消光比或动态消光比、电光晶体的半波电压和波片的相位延迟的综合性自动化测量系统，并首次在国内生产晶体的现场得到应用。该系统的优点和特色在于：采用偏振光测量的光强探测技术、光源调制技术、解调电路、软件除法技术，将光、机、电一体化技术和计算机控制技术有效地结合起来，既可用于科研，也可用于生产现场，实现晶体消光比、半波电压和波片相位延迟三个性能参数的一体化快速自动化高精度测量。光源调制和解调技术克服了采用连续光难以解决的背景光和杂散光的影响，采用软件除法技术，消除了光源波动产生的影响，大大提高了系统本身的消光比，结合计算机控制技术的应用，不仅使测量精度得到保证，而且使整个操作实现全自动化，简便易行。 实验结果和实际使用情况表明，采用本文中的测量原理和方法，光源波长采用 ，该测量系统本身的消光比可达到 ，所测的格兰偏振光镜的消光比为( ) ，所测RTP晶体的消光比为 ，零级结晶石英波片的测量结果为 ，而厚度为 的结晶石英波片的相位延迟为 ，此外，运用电光晶体的纵向调制技术，还可精确测量出电光晶体的半波电压，所测的DKDP晶体的半波电压为 ，其动态消光比为 。 在偏光技术中，常在一个较宽的光谱范围内需要一个稳定的相位延迟量，而菱体 消色差相位延迟器由于其高度消色差性，不仅常用于宽光谱范围内作标准光相位延迟器，以改变光的偏振态，而且作光相位延迟的基准。根据菲涅尔全内反射相变理论，本文给出了双菱体 消色差器详细的结构设计、性能分析和测量方法。由有效通光孔径和光线追迹设计出BK7玻璃在波长 时相位延迟为 的双菱体的结构，用作 至 波长范围的标准 相位延迟器。理论分析了入射角变化、波长变化和应力双折射对双菱体相位延迟的影响，当入射角变化限制在 以内时，其影响得到补偿；波长从 到 产生的误差为 ；若应力双折射最差为 时，所可能引起的误差最大为 。可见，入射角变化和波长变化对双菱体产生的影响非常小，具有较高的消色差性能，应力双折射是影响相位延迟误差的最大因素。 文中详细分析了影响系统测量精度的各误差因素，主要有：光源波长变化、温度变化、入射角倾斜、转台转角误差和光源波动等。分析计算了上述各因素对1064nm波长下厚度为 的 多级结晶石英波片产生的相位延迟误差，其中光源波动的影响在作除法后有显著的改善，各误差因素的综合影响为 ，理论分析与实际测量的结果相符。 本文研制成功的晶体消光比、半波电压和波片相位延迟的综合性测量系统，不仅能够应用于实验室研究，更有意义和价值的在于可以在生产加工晶体或波片的现场，完成多个参数的综合性、一体化、全自动化的高精度测量。在国内首例应用于晶体生产现场的测量，结果表明本测量系统不仅具有很高的实用价值，而且对于推动光电检测技术向高精度、精密化和自动化的方向发展也具有重要的意义。 |
| 英文摘要 | Along with the appearance of laser and the development of laser technology, polarization optics were widely applied in fiber-optic technique, laser manufacture technique, optical modulation technique, photoelectric detection technique and optical sensor technique field etc. Crystal, wave plate and related polarizing elements are the most basic unit of optical system in laser technology and polarization optics. Accurate measurement is an indispensable link and an important research project before processing and using these polarized elements. The extinction ratio of crystal, the half-wave voltage of electro-optical crystal and the phase-retardation of wave plate are three very important property parameters for crystal materials used as polarized devices. The extinction ratio is an indispensable parameter not only for the performance of crystal material but also for the performance of polarizing prism. It reflects the amount of internal stress birefraction of crystal or polarizing prism. The measurement accuracy of the extinction ratio directly affects the research and development, manufacture and application of crystal or polarizing prism. It is an urgent research item to be solved in research and production fields. Wave plate is a polarizing device base on the crystal’s birefraction. It can make certain phase difference, change light’s polarization state between two mutual vertical light waves through their vibration directions. Together with other polarizing devices, it can realize the permances such as: the conversion for various polarization states of light, the rotation of polarization faces and the modulation of various light waves. The phase retardation and optical axis precision of wave plate is one of the most important factors that influence the system qualities of the polarization optics, the laser optics and the optical communication. The half wave voltage is an important parameter for the electric-optical effect of crystal, and according to it, the voltage value that is needed to control the transmission light intensity by using electric-optic effect can be determined. For electric-optic crystal, the half wave voltage is the lower and the better. Many countries are positively developing the measuring methods and techniques for the extinction ratio for crystal or polarizing mirror, the half-wave voltage of electro-optical crystal and the phase-retardation of wave plate, but domestic research still stays merely in the laboratory stage and can only measure a single parameter for one measuring method. There are either not an integrated measurement system suitable or usable for the product and processing line of crystal and wave plate. Therefore, this paper has developed a kind of integrated, automated measurement system for the extinction ratio and half-wave voltage of crystal and the phase retardation of wave plate, and has been used in the product line in our country for the first time. The predominance and the characteristic of the system line in its adoption of light intensity measuring technology for polarizing light, light source modulation and detector demodulation technology and software division technology. Optical, mechanical, electrical and computer control technologies are efficiently combined together in this system to be used in both research and product line to implement the integrative, fast, automated and high accuracy measurement for the above-mentioned three parameters. The modulation of light source and the detector demodulation technology effectively overcome the influence of background light and stray light compared to continuous light. The influence of light source fluctuation was eliminated by using software division technology. So the system’s extinction ratio was highly raised. Combining with the application of advanced computer control technology, it not only made the system’s measurement precision guaranteed but also made the whole operating procedure full automatically, simply and conveniently. Steady phase retardation is often needed in a wide spectrum scope when the polarizing light technology is used. Because of its highly achromatic performance, a birhomb-type achromatic phase retarder is often used not only as a standard phase retarder within a wide range of spectrum to change light polarized state but also as a benchmark for phase retardation. Based on the total-reflection phase transformation theory of the Fresnel reflection, how to design its configuration, analyze its performance and fulfill the measurement of a birhomb-type retarder is presented. Based on effective aperture and light trace, a birhomb-type achromatic retarder at the wavelength of 532nm made from BK7 glass is designed, which acts as a standard phase retarder from the wavelength of 532nm to 1064nm. Retardance errors due to input angle variation，light wavelength variation and stress birefraction are theoretically analyzed, which show that the error due to input angle variation can be compensated when input angle is limited within , and due to wavelength variation is when the wavelength varies from 532nm to 1064nm, but the biggest phase retardation error is when the worst stress birefraction is in the BK7 glass. From above, we can see that the influence of input angle and wavelength variation is very small, so the birhomb has good achromatic performance. Compared with input angle and wavelength variation, stress birefraction is the worst factor that ruslut in phase reatadation error for the birhomb. Experiment result and actual use show that: adopting the method and measurement principle in this paper, the extinction ratio of this measurement system can reach , the extinction ratio of the Green polarizing light prism is ( ) , the extinction ratio of the RTP crystal is , the measurinr result for the phase retardation of 0 level crystallizing quartz wave plate is , the phase retardation of the 0 level crystallizing quartz wave plate with the thickness is . Moreover, with the longitudinal electric-optic modulation technology, we can accurately measure the half wave voltage for electro-optical crystal, the half wave voltage of the DKDP crystal we measured is , its dynamic extinction ratio is . Main error factors that degrade the measurement accuracy are analyzed in detail in this paper, which are: wavelength change of the light source, temperature change of surrounding environment, oblique incidence of the light, rotational angle error of the sample carriers and fluctuation of the light power. Phase retardation errors that arise from the above mentioned factors for a piece of crystallizing quartz plate with thickness of and phase retardation being at are analyzed and calculated. The influence of light fluctuation is greatly improved after using division technique, and the total error is . Compared with the above mentioned result that is tested experimentally, it provs that the result of actual measurement conforms greatly to theoretical analysis. The integrated measurement system that is successfully researched and developed in this paper can not only be used in laboratory for study, but also can be used, more significatively and valuably, in the scene of production and processing line for crystal or wave plate, to realize high accuracy measurements for many parameters synthetically, integrativly and full automatically. The measurement system has been used in product line for crystal for the first time in our country. Measurement results prove that the system has not only very high practical value but also important meaning to promote the opt-electrical testing technique in the direction of high accuracy, precisezation and automatization. |
| 语种 | 中文 |
| 内容类型 | 学位论文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/15612]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 薄锋. 晶体性能综合测量系统的研究[D]. 中国科学院上海光学精密机械研究所. 2007. |
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