Ronchi剪切干涉光刻投影物镜波像差检测技术研究

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 信息光学与光电技术实验室

	Ronchi剪切干涉光刻投影物镜波像差检测技术研究
	吴飞斌 ; 唐锋 ; 王向朝 ; 李杰 ; 李思坤
刊名	中国激光
	2015
卷号	42 期号:3 页码:308008
其他题名	Study on Ronchi Shearing Interferometry for Wave-Front Aberration Measurement of Lithography Projection Lens
通讯作者	Wu Feibin, Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. ; Tang Feng, Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. ; Wang Xiangzhao, Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. ; Li Jie, Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. ; Li Sikun, Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
中文摘要	Ronchi剪切干涉采用扩展光源调制光场空间相干性,具有干涉仪结构简单、共光路、零条纹检测等优点,适合用于光刻机投影物镜波像差原位检测。基于Ronchi剪切干涉的投影物镜波像差检测技术及系统,根据光栅衍射和空间相干性理论推导了Ronchi剪切干涉场的表达式。针对Ronchi剪切干涉仪多级衍射光寄生干涉对相位提取精度的影响,提出了一种十步相移算法,有效地消除9级以内多级衍射的影响,理论上相位提取误差峰谷(PV)值为0.0046 lambda,均方根(RMS)值为0.0019 lambda,实验数据验证了理论推导的正确性和相位提取算法的有效性。
英文摘要	Ronchi shearing interferometry modulates the spatial coherence of light field with extended source. With the advantages of simple structure, common- path, null- fringe detection, and so on the Ronchi shearing interferometer can be used for in situ aberration measurement of lithography projection lens. Ronchi shearing interferometry for wave-front aberration measurement of lithography projection lens is studied. The interference model of Ronchi shearing interferometer is derived by theories of grating diffraction and spatial coherence. A tenstep phase-shifting algorithm is proposed to eliminate negative effects of unwanted interference from the high order diffraction light, which limits the accuracy of phase retrieval. The effects of the first 9 orders interference on phase retrieval accuracy can be eliminated. The peak-valley (PV) value and root mean square (RMS) value of theoretical phase retrieval error are less than 0.0046 lambda and 0.0019 lambda respectively. The theoretical interference model and the phase retrieval algorithm are validated.
收录类别	EI
原文出处	http://www.opticsjournal.net
语种	中文
内容类型	期刊论文
版本	出版稿
源URL	[http://ir.siom.ac.cn/handle/181231/14182]
专题	上海光学精密机械研究所_信息光学与光电技术实验室
作者单位	1.吴飞斌, 中国科学院上海光学精密机械研究所, 中科院信息光学与光电技术实验室, 上海 201800, 中国. 2.唐锋, 中国科学院上海光学精密机械研究所, 中科院信息光学与光电技术实验室, 上海 201800, 中国. 3.王向朝, 中国科学院上海光学精密机械研究所, 中科院信息光学与光电技术实验室, 上海 201800, 中国. 4.李杰, 中国科学院上海光学精密机械研究所, 中科院信息光学与光电技术实验室, 上海 201800, 中国. 5.李思坤, 中国科学院上海光学精密机械研究所, 中科院信息光学与光电技术实验室, 上海 201800, 中国.
推荐引用方式 GB/T 7714	吴飞斌,唐锋,王向朝,等. Ronchi剪切干涉光刻投影物镜波像差检测技术研究[J]. 中国激光,2015,42(3):308008.
APA	吴飞斌,唐锋,王向朝,李杰,&李思坤.(2015).Ronchi剪切干涉光刻投影物镜波像差检测技术研究.中国激光,42(3),308008.
MLA	吴飞斌,et al."Ronchi剪切干涉光刻投影物镜波像差检测技术研究".中国激光 42.3(2015):308008.