Femtosecond laser 3D micromachining: a powerful tool for the fabrication of microfluidic, optofluidic, and electrofluidic devices based on glass

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 强场激光物理国家重点实验室

	Femtosecond laser 3D micromachining: a powerful tool for the fabrication of microfluidic, optofluidic, and electrofluidic devices based on glass
	Sugioka, Koji ; Xu, Jian ; Wu, Dong ; Hanada, Yasutaka ; Wang, Zhongke ; Cheng, Ya ; Midorikawa, Katsumi
刊名	lab chip
	2014
卷号	14 期号:18 页码:3447
关键词	ON-A-CHIP PHOTOSENSITIVE GLASS TRANSPARENT MATERIALS 3-DIMENSIONAL MICROFABRICATION PHOTOSTRUCTURABLE GLASS SELECTIVE METALLIZATION LAB INTEGRATION ABLATION CHANNEL
通讯作者	sugioka, k (reprint author), riken, ctr adv photon, 2-1 hirosawa, wako, saitama 3510198, japan.
英文摘要	femtosecond lasers have unique characteristics of ultrashort pulse width and extremely high peak intensity; however, one of the most important features of femtosecond laser processing is that strong absorption can be induced only at the focus position inside transparent materials due to nonlinear multiphoton absorption. this exclusive feature makes it possible to directly fabricate three-dimensional (3d) microfluidic devices in glass microchips by two methods: 3d internal modification using direct femtosecond laser writing followed by chemical wet etching (femtosecond laser-assisted etching, flae) and direct ablation of glass in water (water-assisted femtosecond laser drilling, wafld). direct femtosecond laser writing also enables the integration of micromechanical, microelectronic, and microoptical components into the 3d microfluidic devices without stacking or bonding substrates. this paper gives a comprehensive review on the state-of-the-art femtosecond laser 3d micromachining for the fabrication of microfluidic, optofluidic, and electrofluidic devices. a new strategy (hybrid femtosecond laser processing) is also presented, in which flae is combined with femtosecond laser two-photon polymerization to realize a new type of biochip termed the ship-in-a-bottle biochip.
收录类别	SCI
语种	英语
内容类型	期刊论文
版本	出版稿
源URL	[http://ir.siom.ac.cn/handle/181231/13605]
专题	上海光学精密机械研究所_强场激光物理国家重点实验室
作者单位	1.[Sugioka, Koji 2.Xu, Jian 3.Wu, Dong 4.Midorikawa, Katsumi] RIKEN, Ctr Adv Photon, Wako, Saitama 3510198, Japan 5.[Hanada, Yasutaka] Hirosaki Univ, Grad Sch Sci & Technol, Hirosaki, Aomori 0368561, Japan 6.[Wang, Zhongke] Singapore Inst Mfg Technol, Singapore
推荐引用方式 GB/T 7714	Sugioka, Koji,Xu, Jian,Wu, Dong,et al. Femtosecond laser 3D micromachining: a powerful tool for the fabrication of microfluidic, optofluidic, and electrofluidic devices based on glass[J]. lab chip,2014,14(18):3447.
APA	Sugioka, Koji.,Xu, Jian.,Wu, Dong.,Hanada, Yasutaka.,Wang, Zhongke.,...&Midorikawa, Katsumi.(2014).Femtosecond laser 3D micromachining: a powerful tool for the fabrication of microfluidic, optofluidic, and electrofluidic devices based on glass.lab chip,14(18),3447.
MLA	Sugioka, Koji,et al."Femtosecond laser 3D micromachining: a powerful tool for the fabrication of microfluidic, optofluidic, and electrofluidic devices based on glass".lab chip 14.18(2014):3447.