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	Simultaneous phase-shifting interferometry study based on the common-path Fizeau Interferometer
	Liu, Feng-Wei1,2; Wu, Yong-Qian1
	2014
会议名称	Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
会议日期	2014
卷号	9282
页码	92821Z
通讯作者	Liu, Feng-Wei
中文摘要	A simultaneous phase-shifting interferometry(SPSI) based on the common-path Fizeau interferometer has been discussed.In this system,two orthogonal polarized beams, using as the reference beam and test beam ,are detached by a particular Wollaston prism at a very small angle,then four equal sub-beams are achieved by a combination of three non-polarizing beam splitters(NPBS),and the phase shifts are introduced by four polarizers whose polarization azimuths are 0° ,45° ,90° ,135° with the horizontal direction respectively,the four phase shift interferograms are collected simultaneously by controlling the CCDs working at the same time .The SPSI principle is studied at first,then is the error analysis, finally we emulate the process of surface recovery by four steps phase shifts algorithm,the results indicate that, to ensure the feasibility of the SPSI system, we have to control the polarization azimuth error of the polarizer in ± 0.5°. © 2014 SPIE.
英文摘要	A simultaneous phase-shifting interferometry(SPSI) based on the common-path Fizeau interferometer has been discussed.In this system,two orthogonal polarized beams, using as the reference beam and test beam ,are detached by a particular Wollaston prism at a very small angle,then four equal sub-beams are achieved by a combination of three non-polarizing beam splitters(NPBS),and the phase shifts are introduced by four polarizers whose polarization azimuths are 0° ,45° ,90° ,135° with the horizontal direction respectively,the four phase shift interferograms are collected simultaneously by controlling the CCDs working at the same time .The SPSI principle is studied at first,then is the error analysis, finally we emulate the process of surface recovery by four steps phase shifts algorithm,the results indicate that, to ensure the feasibility of the SPSI system, we have to control the polarization azimuth error of the polarizer in ± 0.5°. © 2014 SPIE.
收录类别	EI
学科主题	Interferometers - Interferometry - Laser optics - Manufacture - Optical instruments - Optical testing - Phase shifters - Polarization - Prisms - Surface measurement
语种	英语
ISSN号	0277786X
内容类型	会议论文
源URL	[http://ir.ioe.ac.cn/handle/181551/7622]
专题	光电技术研究所_先光中心
作者单位	1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan, China 2.University of Chinese Academy of Sciences, Beijing, China
推荐引用方式 GB/T 7714	Liu, Feng-Wei,Wu, Yong-Qian. Simultaneous phase-shifting interferometry study based on the common-path Fizeau Interferometer[C]. 见:Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment. 2014.

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