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	Experimental study on the absolute measurement of flats
	Zhao, Wenchuan1; Song, Weihong2; Wu, Gaofeng1; Wu, Yongqian1
	2014
会议名称	Fringe 2013 - 7th International Workshop on Advanced Optical Imaging and Metrology
会议日期	2014
页码	503-506
中文摘要	We present an absolute method of shift-rotation to calibrate the flatness of flats. Compared with the conventional three-flat test method, the method requires only two flat and no flips of the flats. And there will be no sag errors introduced by gravity deformations because of the flips of flats. The details of the method are given out in the paper. With multi-rotational measurements and translation measurements, the surface deviation of flats can be obtained with the method. Experimental results are presented to show the availability of the absolute method. © Springer-Verlag Berlin Heidelberg 2014.
英文摘要	We present an absolute method of shift-rotation to calibrate the flatness of flats. Compared with the conventional three-flat test method, the method requires only two flat and no flips of the flats. And there will be no sag errors introduced by gravity deformations because of the flips of flats. The details of the method are given out in the paper. With multi-rotational measurements and translation measurements, the surface deviation of flats can be obtained with the method. Experimental results are presented to show the availability of the absolute method. © Springer-Verlag Berlin Heidelberg 2014.
收录类别	EI
学科主题	Optical image storage - Testing - Units of measurement
语种	英语
内容类型	会议论文
源URL	[http://ir.ioe.ac.cn/handle/181551/7611]
专题	光电技术研究所_先光中心
作者单位	1.Chinese Academy of Sciences, Institute of Optics and Electronics, Chengdu, 610209, China 2.Chinese Academy of Sciences, Graduate University, Beijing, 100039, China
推荐引用方式 GB/T 7714	Zhao, Wenchuan,Song, Weihong,Wu, Gaofeng,et al. Experimental study on the absolute measurement of flats[C]. 见:Fringe 2013 - 7th International Workshop on Advanced Optical Imaging and Metrology. 2014.

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