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Phase shifting interferometry from two normalized interferograms with random tilt phase-shift
Liu, Fengwei1,2; Wu, Yongqian1; Wu, Fan1
刊名Optics Express
2015
卷号23期号:15页码:19932-19946
ISSN号1094-4086
中文摘要We propose a novel phase shifting interferometry from two normalized interferograms with random tilt phase-shift. The determination of tilt phase-shift is performed by extracting the tilted phase-shift plane from the phase difference of two normalized interferograms, and with the calculated tilt phase-shift value the phase distribution can be retrieved from the two normalized frames. By analyzing the distribution of phase difference and utilizing special points fitting method, the tilted phase-shift plane is extracted in three different cases, which relate to different magnitudes of tilts. Proposed method has been applied to simulations and experiments successfully and the satisfactory results manifest that proposed method is of high accuracy and high speed compared with the three step iterative method. Additionally, both open and closed fringe can be analyzed with proposed method. What's more, it cannot only eliminate the small tiltshift error caused by slight vibration in phase-shifting interferometry, but also detect the large tilt phase-shift in phase-tilting interferometry. Thus, it will relaxes the requirements on the accuracy of phase shifter, and the costly phase shifter may even be useless by applying proposed method in high amplitude vibrated circumstance to achieve high-precision analysis. © 2015 Optical Society of America.
英文摘要We propose a novel phase shifting interferometry from two normalized interferograms with random tilt phase-shift. The determination of tilt phase-shift is performed by extracting the tilted phase-shift plane from the phase difference of two normalized interferograms, and with the calculated tilt phase-shift value the phase distribution can be retrieved from the two normalized frames. By analyzing the distribution of phase difference and utilizing special points fitting method, the tilted phase-shift plane is extracted in three different cases, which relate to different magnitudes of tilts. Proposed method has been applied to simulations and experiments successfully and the satisfactory results manifest that proposed method is of high accuracy and high speed compared with the three step iterative method. Additionally, both open and closed fringe can be analyzed with proposed method. What's more, it cannot only eliminate the small tiltshift error caused by slight vibration in phase-shifting interferometry, but also detect the large tilt phase-shift in phase-tilting interferometry. Thus, it will relaxes the requirements on the accuracy of phase shifter, and the costly phase shifter may even be useless by applying proposed method in high amplitude vibrated circumstance to achieve high-precision analysis. © 2015 Optical Society of America.
学科主题Interferometry - Iterative methods - Phase shifters
收录类别SCI ; EI
语种英语
WOS记录号WOS:000361035300133
内容类型期刊论文
源URL[http://ir.ioe.ac.cn/handle/181551/7049]  
专题光电技术研究所_先光中心
作者单位1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan, China
2.University of Chinese Academy of Sciences, Beijing, China
推荐引用方式
GB/T 7714
Liu, Fengwei,Wu, Yongqian,Wu, Fan. Phase shifting interferometry from two normalized interferograms with random tilt phase-shift[J]. Optics Express,2015,23(15):19932-19946.
APA Liu, Fengwei,Wu, Yongqian,&Wu, Fan.(2015).Phase shifting interferometry from two normalized interferograms with random tilt phase-shift.Optics Express,23(15),19932-19946.
MLA Liu, Fengwei,et al."Phase shifting interferometry from two normalized interferograms with random tilt phase-shift".Optics Express 23.15(2015):19932-19946.
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