Surface accuracy analysis of active stressed lap based on structure function

	Surface accuracy analysis of active stressed lap based on structure function
	Zhao, Hongshen ; Fan, Bin ; Li, Xiaojin ; Zeng, Zhige
刊名	OPTICAL REVIEW
	2015
卷号	22 期号:1 页码:52-57
ISSN号	1340-6000
通讯作者	Zhao, HS (reprint author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China.
中文摘要	In grinding and polishing of big mirrors using active stressed lap, lap surface accuracy restricts mirror accuracy and processing efficiency chiefly. Lap surface error, which is the mismatch between the mirror and the lap, causes partial pressure concentration and poor efficiency in grinding or polishing. Different from surface representation of active stressed lap using PV and RMS, structure function could describe average variance over all regions on lap in a given separation. This paper illustrates an efficient technique for representing active stressed lap surface error using structure function and relating bending model to the representation. Example of this procedure is described and results show that this method could represent lap surface exactly; meanwhile the surface accuracy after compensating residual error caused by lap sag could achieve allowable error specification for big mirror manufacturing.
英文摘要	In grinding and polishing of big mirrors using active stressed lap, lap surface accuracy restricts mirror accuracy and processing efficiency chiefly. Lap surface error, which is the mismatch between the mirror and the lap, causes partial pressure concentration and poor efficiency in grinding or polishing. Different from surface representation of active stressed lap using PV and RMS, structure function could describe average variance over all regions on lap in a given separation. This paper illustrates an efficient technique for representing active stressed lap surface error using structure function and relating bending model to the representation. Example of this procedure is described and results show that this method could represent lap surface exactly; meanwhile the surface accuracy after compensating residual error caused by lap sag could achieve allowable error specification for big mirror manufacturing.
学科主题	Structure function; Active stressed lap; Big mirror processing; Surface representation
收录类别	SCI
语种	英语
WOS记录号	WOS:000353630200008
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/7043]
专题	光电技术研究所_先光中心
作者单位	1.[Zhao, Hongshen 2.Fan, Bin 3.Li, Xiaojin 4.Zeng, Zhige] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China 5.[Zhao, Hongshen] Univ Chinese Acad Sci, Beijing 100039, Peoples R China
推荐引用方式 GB/T 7714	Zhao, Hongshen,Fan, Bin,Li, Xiaojin,et al. Surface accuracy analysis of active stressed lap based on structure function[J]. OPTICAL REVIEW,2015,22(1):52-57.
APA	Zhao, Hongshen,Fan, Bin,Li, Xiaojin,&Zeng, Zhige.(2015).Surface accuracy analysis of active stressed lap based on structure function.OPTICAL REVIEW,22(1),52-57.
MLA	Zhao, Hongshen,et al."Surface accuracy analysis of active stressed lap based on structure function".OPTICAL REVIEW 22.1(2015):52-57.