A quick algorithm of exposure distribution for fabrication of micro-optical structures

	A quick algorithm of exposure distribution for fabrication of micro-optical structures
	Li Shuhong; Du Chunlei; Fu Yongqi
刊名	OPTIK
	2010
卷号	121 期号:11 页码:988-992
通讯作者	Li SH (Li Shuhong)
语种	英语
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/7361]
专题	光电技术研究所_微电子装备总体研究室（四室）
作者单位	中国科学院光电技术研究所
推荐引用方式 GB/T 7714	Li Shuhong,Du Chunlei,Fu Yongqi. A quick algorithm of exposure distribution for fabrication of micro-optical structures[J]. OPTIK,2010,121(11):988-992.
APA	Li Shuhong,Du Chunlei,&Fu Yongqi.(2010).A quick algorithm of exposure distribution for fabrication of micro-optical structures.OPTIK,121(11),988-992.
MLA	Li Shuhong,et al."A quick algorithm of exposure distribution for fabrication of micro-optical structures".OPTIK 121.11(2010):988-992.