Theoretical design of shadowing masks for uniform coatings on spherical substrates in planetary rotation systems

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 薄膜光学技术研究室（十一室）

	Theoretical design of shadowing masks for uniform coatings on spherical substrates in planetary rotation systems
	Liu, Cunding 1; Kong, Mingdong 1; Guo, Chun 1,2; Gao, Weidong 1; Li, Bincheng 1
刊名	Optics Express
	2012
卷号	20 期号:21 页码:23790-23797
通讯作者	Liu, C.
中文摘要	A straightforward theoretical routine is proposed to design shadowing masks which are used for preparing uniform coatings on flat as well as strongly curved spherical substrates with large diameters in planetary rotation system. By approximating a spherical substrate in planetary rotation to a corresponding flat substrate in simple rotation around the revolution axis, the initial shape of a shadowing mask is determined. The desired uniformity for the spherical substrate is further realized through expanding appropriately the arc length of the initial shadowing mask. Utilizing the shadowing masks designed with the theoretical routine, film uniformities better than 97% are experimentally achieved for large-diameter spherical substrates with ratios of clear aperture to radius of curvature range from approximately -1.0 to 1.3. © 2012 Optical Society of America.
英文摘要	A straightforward theoretical routine is proposed to design shadowing masks which are used for preparing uniform coatings on flat as well as strongly curved spherical substrates with large diameters in planetary rotation system. By approximating a spherical substrate in planetary rotation to a corresponding flat substrate in simple rotation around the revolution axis, the initial shape of a shadowing mask is determined. The desired uniformity for the spherical substrate is further realized through expanding appropriately the arc length of the initial shadowing mask. Utilizing the shadowing masks designed with the theoretical routine, film uniformities better than 97% are experimentally achieved for large-diameter spherical substrates with ratios of clear aperture to radius of curvature range from approximately -1.0 to 1.3. © 2012 Optical Society of America.
学科主题	Coatings - Rotation - Spheres
收录类别	EI
语种	英语
WOS记录号	WOS:000309955100084
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/6606]
专题	光电技术研究所_薄膜光学技术研究室（十一室）
作者单位	1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China 2.Graduate School, Chinese Academy of Sciences, Beijing 100039, China
推荐引用方式 GB/T 7714	Liu, Cunding,Kong, Mingdong,Guo, Chun,et al. Theoretical design of shadowing masks for uniform coatings on spherical substrates in planetary rotation systems[J]. Optics Express,2012,20(21):23790-23797.
APA	Liu, Cunding,Kong, Mingdong,Guo, Chun,Gao, Weidong,&Li, Bincheng.(2012).Theoretical design of shadowing masks for uniform coatings on spherical substrates in planetary rotation systems.Optics Express,20(21),23790-23797.
MLA	Liu, Cunding,et al."Theoretical design of shadowing masks for uniform coatings on spherical substrates in planetary rotation systems".Optics Express 20.21(2012):23790-23797.