Thermodynamic analysis of GaSb-GaCl3 vapor phase epitaxy

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	Thermodynamic analysis of GaSb-GaCl3 vapor phase epitaxy
	Lu DC ; Lin LY
	2001
会议名称	1st international symposium on microgravity research and applications in physical sciences and biotechnology
会议日期	sep 10-15, 2000
会议地点	sorrento, italy
关键词	TRANSPORT
页码	425-430
通讯作者	lu dc chinese acad sci inst semicond lab semicond mat sci beijing 100083 peoples r china.
中文摘要	a thermodynamic model for the gasb-gacl3 system in a closed quartz ampoule was proposed. the species in the gas phase are gacl, gacl3, sb-4, sb-2. the partial pressures of these species and total pressure in the ampoule have been calculated. the calculated results indicate that the equilibrium partial pressures of gacl, gacl3, sb4, sb2 and the total pressure in the ampoule have strong dependence on temperature, free volume inside the closed ampoule and amount of transport agent gacl3. the total pressure will give strong influence not only on the flow pattern in the ampoule, but also on the uniformity of the epilayer.
英文摘要	a thermodynamic model for the gasb-gacl3 system in a closed quartz ampoule was proposed. the species in the gas phase are gacl, gacl3, sb-4, sb-2. the partial pressures of these species and total pressure in the ampoule have been calculated. the calculated results indicate that the equilibrium partial pressures of gacl, gacl3, sb4, sb2 and the total pressure in the ampoule have strong dependence on temperature, free volume inside the closed ampoule and amount of transport agent gacl3. the total pressure will give strong influence not only on the flow pattern in the ampoule, but also on the uniformity of the epilayer.; 于2010-10-29批量导入; made available in dspace on 2010-10-29t06:36:54z (gmt). no. of bitstreams: 1 2897.pdf: 230302 bytes, checksum: 136a2991b912100730b670b3989431fc (md5) previous issue date: 2001; european space agcy.; seconda univ napoli.; asi.; cnes.; csa.; dlr.; nasa.; nasda.; chinese acad sci, inst semicond, lab semicond mat sci, beijing 100083, peoples r china
收录类别	CPCI-S
会议主办者	european space agcy.; seconda univ napoli.; asi.; cnes.; csa.; dlr.; nasa.; nasda.
会议录	first international symposium on microgravity research & applications in physical sciences and biotechnology, vols i and ii, proceedings, 454
会议录出版者	european space agency ; 8-10 rue mario nikis, 75738 paris, france
会议录出版地	8-10 rue mario nikis, 75738 paris, france
学科主题	半导体材料
语种	英语
ISSN号	0379-6566
ISBN号	92-9092-657-0
内容类型	会议论文
源URL	[http://ir.semi.ac.cn/handle/172111/13737]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Lu DC,Lin LY. Thermodynamic analysis of GaSb-GaCl3 vapor phase epitaxy[C]. 见:1st international symposium on microgravity research and applications in physical sciences and biotechnology. sorrento, italy. sep 10-15, 2000.