Periodic Co/C, Cr/C, and CoCr/C soft X-ray multilayers prepared by N reactive sputtering

	Periodic Co/C, Cr/C, and CoCr/C soft X-ray multilayers prepared by N reactive sputtering
	Wen; Mingwu; Jiang; Li; Zhang; Zhong; Huang; Qiushi; Wang; Zhanshan
刊名	Proceedings of SPIE
	2015
卷号	9510 页码:95100X
关键词	Soft X-ray Polarization Cr/C multilayer Co/C multilayer CoCr/C multilayer Nitridation
英文摘要	Lightweight Asymmetry and Magnetism Probe project (LAMP) was proposed in China to observe the polarized radiation around 250 eV emitted by soft X-ray celestial sources, like puslars, active galactic, black hole binaries, etc. To produce the high efficiency soft X-ray polarizer for LAMP, we are developing Co/C, Cr/C, CoCr/C X-ray multilayers using magnetron sputtering and reactive sputtering with nitrogen. Hard X-ray grazing incidence reflectometry (GIXR) and soft X-ray reflectance measurements were used to study the interface and microstructure of different multilayers. In comparison to the multilayers deposited by normal magnetron sputtering, reactively-sputtered multilayers show higher reflectivity around 250 eV and lower interfacial roughness. As a result, Co/C, Cr/C, CoCr/C multilayers with smaller period can be made with respect to the multilayer fabricated using non-reactive sputtering. The X-ray performance of reactive sputtered Co/C and CoCr/C multilayers can be further improved by optimizing the deposition process.
学科主题	Engineering; Optics; Physics
类目[WOS]	Engineering, Electrical & Electronic ; Optics ; Physics, Applied
收录类别	EI ; CPCI
WOS记录号	WOS:000356859800027
公开日期	2016-05-03
内容类型	期刊论文
源URL	[http://ir.ihep.ac.cn/handle/311005/228887]
专题	高能物理研究所_多学科研究中心
推荐引用方式 GB/T 7714	Wen,Mingwu,Jiang,et al. Periodic Co/C, Cr/C, and CoCr/C soft X-ray multilayers prepared by N reactive sputtering[J]. Proceedings of SPIE,2015,9510:95100X.
APA	Wen.,Mingwu.,Jiang.,Li.,Zhang.,...&崔明启.(2015).Periodic Co/C, Cr/C, and CoCr/C soft X-ray multilayers prepared by N reactive sputtering.Proceedings of SPIE,9510,95100X.
MLA	Wen,et al."Periodic Co/C, Cr/C, and CoCr/C soft X-ray multilayers prepared by N reactive sputtering".Proceedings of SPIE 9510(2015):95100X.