Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2/Si multilayer Laue lens

	Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2/Si multilayer Laue lens
	Huang, QS; Li, HC; Song, ZQ; Zhu, JT; Wang, ZS; Li, AG; Yan, SA; Mao, CW; Wang, H; Yan, F
刊名	CHINESE PHYSICS C
	2013
卷号	37 期号:2 页码:28002
关键词	nano-focusing hard X-ray multilayer Laue lens synchrotron radiation diffraction
英文摘要	The multilayer Laue lens (MLL) is a novel diffraction optics which can realize nanometer focusing of hard X-rays with high efficiency. In this paper, a 7.9 mu m-thick MLL with the outmost layer thickness of 15 nm is designed based on dynamical diffraction theory. The MLL is fabricated by first depositing the depth-graded multilayer using direct current (DC) magnetron sputtering technology. Then, the multilayer sample is sliced, and both cross-sections are thinned and polished to a depth of 35-41 mu m. The focusing property of the MLL is measured at the Shanghai Synchrotron Facility (SSRF). One-dimensional (1D) focusing resolutions of 205 nm and 221 nm are obtained at E=14 keV and 18 keV, respectively. It demonstrates that the fabricated MLL can focus hard X-rays into nanometer scale.
学科主题	Physics
收录类别	SCI
WOS记录号	WOS:000320547600018
公开日期	2016-05-03
内容类型	期刊论文
源URL	[http://ir.ihep.ac.cn/handle/311005/224750]
专题	中国科学院高能物理研究所
推荐引用方式 GB/T 7714	Huang, QS,Li, HC,Song, ZQ,et al. Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2/Si multilayer Laue lens[J]. CHINESE PHYSICS C,2013,37(2):28002.
APA	Huang, QS.,Li, HC.,Song, ZQ.,Zhu, JT.,Wang, ZS.,...&刘鹏.(2013).Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2/Si multilayer Laue lens.CHINESE PHYSICS C,37(2),28002.
MLA	Huang, QS,et al."Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2/Si multilayer Laue lens".CHINESE PHYSICS C 37.2(2013):28002.