Low-Microwave Loss Coplanar Waveguides Fabricated  on High-Resistivity Silicon Substrate

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	Low-Microwave Loss Coplanar Waveguides Fabricated on High-Resistivity Silicon Substrate
	Yang Hua; Wang Wei; Wang Wei
刊名	半导体学报
	2006
卷号	27 期号:1 页码:1-4
中文摘要	three kinds of coplanar waveguides （cpws） are designed and fabricated on different silicon substrates---common low-resistivity silicon substrate （lrs）, lrs with a 3μm-thick silicon oxide interlayer, and high-resistivity silicon （hrs） substrate. the results show that the microwave loss of a cpw on lrs is too high to be used, but it can be greatly reduced by adding a thick interlayer of silicon oxide between the cpw transmission lines and the lrs.a cpw directly on hrs shows a loss lower than 2db/cm in the range of 0-26ghz and the process is simple,so hrs is a more suitable cpw substrate.
英文摘要	three kinds of coplanar waveguides （cpws） are designed and fabricated on different silicon substrates---common low-resistivity silicon substrate （lrs）, lrs with a 3μm-thick silicon oxide interlayer, and high-resistivity silicon （hrs） substrate. the results show that the microwave loss of a cpw on lrs is too high to be used, but it can be greatly reduced by adding a thick interlayer of silicon oxide between the cpw transmission lines and the lrs.a cpw directly on hrs shows a loss lower than 2db/cm in the range of 0-26ghz and the process is simple,so hrs is a more suitable cpw substrate.; 于2010-11-23批量导入; zhangdi于2010-11-23 13:03:34导入数据到semi-ir的ir; made available in dspace on 2010-11-23t05:03:34z (gmt). no. of bitstreams: 1 4334.pdf: 355188 bytes, checksum: d3caf25d0f3c8805a0ae39f0c6f18457 (md5) previous issue date: 2006; 国家重点基础研究发展规划,国家高技术研究发展计划,国家自然科学基金; institute of semiconductors, chinese academy of sciences
学科主题	半导体材料
收录类别	CSCD
资助信息	国家重点基础研究发展规划,国家高技术研究发展计划,国家自然科学基金
语种	英语
公开日期	2010-11-23 ; 2011-04-29
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/16755]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Yang Hua,Wang Wei,Wang Wei. Low-Microwave Loss Coplanar Waveguides Fabricated on High-Resistivity Silicon Substrate[J]. 半导体学报,2006,27(1):1-4.
APA	Yang Hua,Wang Wei,&Wang Wei.(2006).Low-Microwave Loss Coplanar Waveguides Fabricated on High-Resistivity Silicon Substrate.半导体学报,27(1),1-4.
MLA	Yang Hua,et al."Low-Microwave Loss Coplanar Waveguides Fabricated on High-Resistivity Silicon Substrate".半导体学报 27.1(2006):1-4.