低密度台阶形闪耀光栅的制作

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	低密度台阶形闪耀光栅的制作
	贾伟 ; 周常河 ; 戴恩文 ; 底彩慧
刊名	中国激光
	2008
卷号	35 期号:2 页码:183
关键词	衍射与光栅闪耀光栅低密度衍射效率 Blazed grating Low density
ISSN号	0258-7025
其他题名	Fabrication of low-density blazed gratings
中文摘要	介绍了制作低密度闪耀光栅的过程,在制作时,对传统的制作过程进行了改进,有效提高了制作质量。以40μm闪耀光栅为例介绍了制作的过程,得到了良好的光栅表面形貌,并且闪耀级次的衍射效率达到了70%以上。相比传统的制作方法,效率提高了5%～10%。对比了理论上的衍射效率,分析了实验误差,发现把存在对准误差的光栅进行处理将会有效地提高其衍射效率,为进一步提高闪耀光栅的衍射效率提供了依据。; The process of fabricating low-density blazed gratings is presented. Some novel improvements have been reported, which lead to gratings with better quality. In experiment, 40μm period blazed gratings with uniform surface are obtained, and the diffraction efficiency of the first order is more than 70%. Compared with traditional method, the efficiency is increased by 5%-10%. Finally, the efficiency of experimental results is compared with theory value, and the reasons of experimental errors are given. It is found that if tips introduced by experiment errors can be removed, the efficiency will be increased greatly, which provide bases on getting better gratings and higher diffraction efficiency.
学科主题	光栅
收录类别	EI
语种	中文
公开日期	2009-09-18
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/1454]
专题	上海光学精密机械研究所_信息光学开放实验室
推荐引用方式 GB/T 7714	贾伟,周常河,戴恩文,等. 低密度台阶形闪耀光栅的制作[J]. 中国激光,2008,35(2):183, 186.
APA	贾伟,周常河,戴恩文,&底彩慧.(2008).低密度台阶形闪耀光栅的制作.中国激光,35(2),183.
MLA	贾伟,et al."低密度台阶形闪耀光栅的制作".中国激光 35.2(2008):183.