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	Investigation of optical and material properties of Si/SiGe/Si heterostructures by using spectroscopic ellipsometry and a variety of characterizations
	Deng Xie; Zhi Ren Qiu; Ting Mei; Chee Wee Liu; Zhe Chuan Feng
	2014-03
会议名称	osa topical conference:the 4th advances in optoelectronics and micro/nano-optics
会议日期	2014-09
会议地点	xi’an, china
通讯作者	zhi ren qiu
收录类别	非正式出版
会议主办者	xi'an institute of optics and precision mechanics, cas; northwestern polytechnical university
会议录出版地	xi’an, china
语种	英语
内容类型	会议论文
源URL	[http://ir.opt.ac.cn/handle/181661/23061]
专题	会议录_AOM 2014(OSA Topical Conference:The 4th Advances in Optoelectronics and Micro/nano-optics
推荐引用方式 GB/T 7714	Deng Xie,Zhi Ren Qiu,Ting Mei,et al. Investigation of optical and material properties of Si/SiGe/Si heterostructures by using spectroscopic ellipsometry and a variety of characterizations[C]. 见:osa topical conference:the 4th advances in optoelectronics and micro/nano-optics. xi’an, china. 2014-09.

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